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50,591,000 Yen (FY1995;17,633,000 Yen)
Adsorption process as well as adsorbents for recovery of dilute fluorocarbons have been studied.
Using microwave, we have studied the adsorption of fluorocarbon on zeolite from gas mixture containing water which interferes with adsorption. It was found that the adsorption of fluorocarbon improved outstandingly when adsorption was conducted under microwave irradiation.
As for adsorbents, the following conclusions were obtained. Ion exchange of NaY zeolite by lead ion raised the fluorocarbon adsorption ability in the low concentration range. Activated carbon of high adsorbability can be prepared by controlled gasification of char with carbon dioxide or steam.
Adsorption, Adsorbents, Fluorocarbon, Microwave