| ͺθΗξρ | | Τlf[^ | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ͺθΗR[h | s¬Ί | ͺθΗΌΜ | Lψͺθϊ | ͺθΤ | ½Οl | 1ΤlΜΕl | ϊ½ΟlΜΕl | 1Τlͺ0.2ppmπ΄¦½Τ | 1Τlͺ0.1ppmΘγ0.2ppmΘΊΜΤ | ϊ½Οlͺ0.06ppm𴦽ϊ | ϊ½Οlͺ0.04ppmΘγ0.06ppmΘΊΜϊ | |
| (ϊ) | (Τ) | (ppm) | (ppm) | (ppm) | (Τ) | (Τ) | (ϊ) | (ϊ) | ||||
| 02201070 | ΒXs | η¬wZ | 4 | 30 | 717 | 0.004 | 0.021 | 0.009 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.003 | 0.015 | 0.007 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 716 | 0.003 | 0.024 | 0.009 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 739 | 0.003 | 0.009 | 0.005 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.003 | 0.009 | 0.005 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 716 | 0.003 | 0.013 | 0.006 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.005 | 0.017 | 0.010 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.006 | 0.027 | 0.018 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 740 | 0.011 | 0.040 | 0.027 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.007 | 0.038 | 0.015 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 690 | 0.007 | 0.034 | 0.016 | 0 | 0 | 0 | 0 | |||
| 3 | 31 | 736 | 0.006 | 0.036 | 0.018 | 0 | 0 | 0 | 0 | |||
| 02201080 | ΒXs | bc¬wZ | 4 | 30 | 716 | 0.004 | 0.026 | 0.011 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.003 | 0.023 | 0.007 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 716 | 0.004 | 0.024 | 0.008 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 739 | 0.004 | 0.013 | 0.007 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.003 | 0.021 | 0.007 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 716 | 0.003 | 0.016 | 0.005 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.004 | 0.021 | 0.009 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.005 | 0.029 | 0.017 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 740 | 0.010 | 0.034 | 0.020 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.007 | 0.038 | 0.013 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 691 | 0.007 | 0.034 | 0.014 | 0 | 0 | 0 | 0 | |||
| 3 | 31 | 738 | 0.007 | 0.039 | 0.016 | 0 | 0 | 0 | 0 | |||
| 02202060 | OOs | OOζκwZ | 4 | 30 | 715 | 0.004 | 0.015 | 0.006 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.003 | 0.013 | 0.005 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 716 | 0.003 | 0.010 | 0.005 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 739 | 0.002 | 0.007 | 0.003 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.002 | 0.007 | 0.003 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 716 | 0.003 | 0.009 | 0.004 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.004 | 0.019 | 0.008 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.006 | 0.030 | 0.012 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 740 | 0.010 | 0.036 | 0.020 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.009 | 0.045 | 0.022 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.008 | 0.046 | 0.023 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 732 | 0.007 | 0.036 | 0.011 | 0 | 0 | 0 | 0 | |||
| 02203050 | ͺΛs | ͺέ¬wZ | 4 | 30 | 716 | 0.005 | 0.030 | 0.012 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.006 | 0.030 | 0.013 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 716 | 0.006 | 0.036 | 0.014 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 737 | 0.005 | 0.026 | 0.013 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.004 | 0.026 | 0.013 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 715 | 0.005 | 0.028 | 0.009 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.004 | 0.027 | 0.008 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.006 | 0.035 | 0.013 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 739 | 0.008 | 0.041 | 0.016 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.006 | 0.033 | 0.013 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.006 | 0.038 | 0.013 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 733 | 0.007 | 0.031 | 0.016 | 0 | 0 | 0 | 0 | |||
| 02203220 | ͺΛs | j[μ¬wZ | 4 | 30 | 716 | 0.004 | 0.028 | 0.013 | 0 | 0 | 0 | 0 |
| 5 | 31 | 738 | 0.004 | 0.029 | 0.009 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 716 | 0.004 | 0.026 | 0.008 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 738 | 0.004 | 0.030 | 0.010 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 739 | 0.003 | 0.019 | 0.007 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 716 | 0.003 | 0.019 | 0.005 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.003 | 0.021 | 0.006 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 715 | 0.003 | 0.029 | 0.011 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 740 | 0.005 | 0.036 | 0.013 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 738 | 0.003 | 0.022 | 0.008 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.004 | 0.033 | 0.011 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 734 | 0.003 | 0.020 | 0.011 | 0 | 0 | 0 | 0 | |||
| 02203240 | ͺΛs | ͺΛ¬wZ | 4 | 30 | 712 | 0.005 | 0.036 | 0.015 | 0 | 0 | 0 | 0 |
| 5 | 31 | 734 | 0.005 | 0.039 | 0.015 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 712 | 0.006 | 0.032 | 0.014 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 734 | 0.005 | 0.034 | 0.017 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 736 | 0.004 | 0.024 | 0.013 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 712 | 0.004 | 0.032 | 0.007 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 734 | 0.004 | 0.021 | 0.007 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 712 | 0.005 | 0.031 | 0.010 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 736 | 0.009 | 0.042 | 0.019 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 734 | 0.006 | 0.034 | 0.010 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 688 | 0.006 | 0.038 | 0.016 | 0 | 0 | 0 | 0 | |||
| 3 | 7 | 175 | 0.009 | 0.034 | 0.017 | 0 | 0 | 0 | 0 | |||
| 02203260 | ͺΛs | ͺΛCΫΟͺ | 4 | 30 | 716 | 0.007 | 0.035 | 0.014 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.006 | 0.032 | 0.012 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 715 | 0.006 | 0.034 | 0.013 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 738 | 0.006 | 0.050 | 0.015 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.005 | 0.029 | 0.013 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 714 | 0.005 | 0.035 | 0.008 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.005 | 0.029 | 0.010 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.007 | 0.027 | 0.012 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 739 | 0.011 | 0.044 | 0.018 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.007 | 0.033 | 0.012 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.008 | 0.031 | 0.014 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 733 | 0.007 | 0.031 | 0.013 | 0 | 0 | 0 | 0 | |||
| 02204010 | Ξs | X|JCΞ | 4 | 30 | 715 | 0.003 | 0.013 | 0.005 | 0 | 0 | 0 | 0 |
| 5 | 30 | 732 | 0.002 | 0.008 | 0.005 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 716 | 0.002 | 0.009 | 0.004 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 739 | 0.002 | 0.006 | 0.003 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.002 | 0.009 | 0.003 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 716 | 0.002 | 0.009 | 0.005 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.002 | 0.011 | 0.003 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.004 | 0.022 | 0.010 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 740 | 0.006 | 0.031 | 0.013 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.006 | 0.039 | 0.012 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 691 | 0.005 | 0.032 | 0.010 | 0 | 0 | 0 | 0 | |||
| 3 | 31 | 740 | 0.004 | 0.024 | 0.008 | 0 | 0 | 0 | 0 | |||
| 02205010 | άμ΄s | άμ΄ζOw | 4 | 30 | 716 | 0.002 | 0.013 | 0.005 | 0 | 0 | 0 | 0 |
| 5 | 31 | 738 | 0.002 | 0.010 | 0.004 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 714 | 0.002 | 0.006 | 0.003 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 737 | 0.002 | 0.005 | 0.003 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.002 | 0.008 | 0.003 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 714 | 0.002 | 0.013 | 0.004 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.002 | 0.019 | 0.004 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 715 | 0.003 | 0.019 | 0.008 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 739 | 0.004 | 0.030 | 0.012 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 738 | 0.003 | 0.021 | 0.008 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.004 | 0.021 | 0.007 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 735 | 0.003 | 0.026 | 0.008 | 0 | 0 | 0 | 0 | |||
| 02206030 | \acs | O{ΨwZ | 4 | 30 | 716 | 0.003 | 0.017 | 0.006 | 0 | 0 | 0 | 0 |
| 5 | 31 | 738 | 0.003 | 0.013 | 0.006 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 715 | 0.002 | 0.013 | 0.004 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 738 | 0.002 | 0.009 | 0.003 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 739 | 0.002 | 0.008 | 0.004 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 714 | 0.002 | 0.008 | 0.003 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.002 | 0.014 | 0.004 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.003 | 0.026 | 0.006 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 740 | 0.006 | 0.034 | 0.012 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 738 | 0.004 | 0.027 | 0.008 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.004 | 0.028 | 0.007 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 736 | 0.003 | 0.021 | 0.006 | 0 | 0 | 0 | 0 | |||
| 02207020 | Oςs | ͺOς¬ΰοΩ | 4 | 30 | 716 | 0.003 | 0.023 | 0.007 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.003 | 0.022 | 0.010 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 715 | 0.003 | 0.012 | 0.005 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 739 | 0.003 | 0.013 | 0.004 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 740 | 0.002 | 0.013 | 0.005 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 715 | 0.003 | 0.016 | 0.005 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.003 | 0.021 | 0.006 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.004 | 0.025 | 0.009 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 739 | 0.007 | 0.047 | 0.016 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.005 | 0.031 | 0.011 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.005 | 0.042 | 0.012 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 735 | 0.004 | 0.031 | 0.008 | 0 | 0 | 0 | 0 | |||
| 02208030 | ήΒs | ΟΆ¬wZ | 4 | 30 | 714 | 0.003 | 0.014 | 0.005 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.002 | 0.009 | 0.003 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 715 | 0.002 | 0.009 | 0.004 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 739 | 0.001 | 0.007 | 0.003 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 739 | 0.002 | 0.012 | 0.003 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 714 | 0.003 | 0.020 | 0.005 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 739 | 0.003 | 0.014 | 0.005 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.003 | 0.020 | 0.009 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 739 | 0.006 | 0.041 | 0.012 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.005 | 0.035 | 0.010 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.005 | 0.037 | 0.012 | 0 | 0 | 0 | 0 | |||
| 3 | 31 | 737 | 0.005 | 0.035 | 0.014 | 0 | 0 | 0 | 0 | |||
| 02411010 | ZPΊ | ZΊφιo | 4 | 30 | 715 | 0.002 | 0.015 | 0.005 | 0 | 0 | 0 | 0 |
| 5 | 31 | 739 | 0.002 | 0.014 | 0.004 | 0 | 0 | 0 | 0 | |||
| 6 | 30 | 716 | 0.002 | 0.012 | 0.004 | 0 | 0 | 0 | 0 | |||
| 7 | 31 | 738 | 0.002 | 0.017 | 0.005 | 0 | 0 | 0 | 0 | |||
| 8 | 31 | 739 | 0.002 | 0.012 | 0.004 | 0 | 0 | 0 | 0 | |||
| 9 | 30 | 716 | 0.002 | 0.009 | 0.003 | 0 | 0 | 0 | 0 | |||
| 10 | 31 | 738 | 0.002 | 0.013 | 0.005 | 0 | 0 | 0 | 0 | |||
| 11 | 30 | 716 | 0.002 | 0.015 | 0.005 | 0 | 0 | 0 | 0 | |||
| 12 | 31 | 739 | 0.004 | 0.040 | 0.013 | 0 | 0 | 0 | 0 | |||
| 1 | 31 | 739 | 0.003 | 0.030 | 0.008 | 0 | 0 | 0 | 0 | |||
| 2 | 29 | 692 | 0.003 | 0.024 | 0.006 | 0 | 0 | 0 | 0 | |||
| 3 | 30 | 733 | 0.003 | 0.025 | 0.007 | 0 | 0 | 0 | 0 | |||